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A wavelet based multiscale run-by-run controller for multiple input multiple output (MIMO) processes

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Material Information

Title:
A wavelet based multiscale run-by-run controller for multiple input multiple output (MIMO) processes
Physical Description:
Book
Language:
English
Creator:
Kothamasu, Santosh
Publisher:
University of South Florida
Place of Publication:
Tampa, Fla.
Publication Date:

Subjects

Subjects / Keywords:
multiresolution
CMP
RbR
dEWMA
denoising
Dissertations, Academic -- Industrial Engineering -- Masters -- USF   ( lcsh )
Genre:
government publication (state, provincial, terriorial, dependent)   ( marcgt )
bibliography   ( marcgt )
theses   ( marcgt )
non-fiction   ( marcgt )

Notes

Summary:
ABSTRACT: Run-by-Run (RbR) control is an online supervisory control strategy designed for the batch manufacturing industry. The objective of RbR control is to minimize process drift, shift and variability between machine runs, thereby reducing costs. The most widely used RbR controllers use the Exponentially Weighted Moving Average (EWMA) filter. However, the linear nature of the EWMA filter makes these RbR controllers inefficient for processes with features at multiple frequencies (also known as multiscale processes). Recent developments in wavelet theory have enhanced the ability to analyze events in multiscale processes. New RbR control strategies have started to emerge that incorporate wavelet analysis. These controllers, developed at the University of South Florida, seem to be robust in dealing with multiscale processes. The objective of this research is to integrate the wavelet based, multiscale analysis approach with the existing double EWMA RbR control strategy for controlling a multiple input multiple output (MIMO) process. The new controller (WRbR controller) is applied on a Chemical Mechanical Planerization process having four inputs and two outputs. A continuous drift and mean shift are introduced in the process, which is then controlled using both the existing double EWMA and the new wavelet based RbR controllers. The results indicate that the wavelet based controller is better in terms of the average square deviation and the standard deviation in the process outputs. Moreover, the observed decrease in the magnitude of the average absolute input deviation indicates a smoother process operation.
Thesis:
Thesis (M.S.I.E.)--University of South Florida, 2004.
Bibliography:
Includes bibliographical references.
System Details:
System requirements: World Wide Web browser and PDF reader.
System Details:
Mode of access: World Wide Web.
Statement of Responsibility:
by Santosh Kothamasu.
General Note:
Title from PDF of title page.
General Note:
Document formatted into pages;contains 75 pages.

Record Information

Source Institution:
University of South Florida Library
Holding Location:
University of South Florida
Rights Management:
All applicable rights reserved by the source institution and holding location.
Resource Identifier:
aleph - 001478745
oclc - 56389565
notis - AJS2435
usfldc doi - E14-SFE0000387
usfldc handle - e14.387
System ID:
SFS0025079:00001


This item is only available as the following downloads:


Full Text
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A wavelet based multiscale run-by-run controller for multiple input multiple output (MIMO) processes
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ABSTRACT: Run-by-Run (RbR) control is an online supervisory control strategy designed for the batch manufacturing industry. The objective of RbR control is to minimize process drift, shift and variability between machine runs, thereby reducing costs. The most widely used RbR controllers use the Exponentially Weighted Moving Average (EWMA) filter. However, the linear nature of the EWMA filter makes these RbR controllers inefficient for processes with features at multiple frequencies (also known as multiscale processes). Recent developments in wavelet theory have enhanced the ability to analyze events in multiscale processes. New RbR control strategies have started to emerge that incorporate wavelet analysis. These controllers, developed at the University of South Florida, seem to be robust in dealing with multiscale processes. The objective of this research is to integrate the wavelet based, multiscale analysis approach with the existing double EWMA RbR control strategy for controlling a multiple input multiple output (MIMO) process. The new controller (WRbR controller) is applied on a Chemical Mechanical Planerization process having four inputs and two outputs. A continuous drift and mean shift are introduced in the process, which is then controlled using both the existing double EWMA and the new wavelet based RbR controllers. The results indicate that the wavelet based controller is better in terms of the average square deviation and the standard deviation in the process outputs. Moreover, the observed decrease in the magnitude of the average absolute input deviation indicates a smoother process operation.
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€AC‚„ƒ<…†3‡ˆ6‰‡…Š3‚Œ‹OƒD‚]ƒ<‡„Žx‹p‡ƒ<†}ƒ<‘E‚pŽA}€A…’4‘ŠA‡”“'‚–•”Šm‚ŒŽA”ƒ<—A—|pˆ]F…™@ƒD‚ŒV‡ˆFC‰@‡…Š‚p‹ƒD‚š‚pŽA?]ƒ<‘†…‹p‡ƒ<†nƒ<Š|€›ƒD‚š‚pŽvƒD‚œ‹‘‡]ƒ<†<Ÿ  Ÿ>¡H¢6£¤')¦]"£§\¨mR¢F¦¤'"O"£§ŽAp‹pA†‚Œ…ŠAW•yƒI<†‚?‡ˆ6‰‡…Š3‚p‹xƒDpm‚pŽAp‹pŽAˆ†€A€|‹p…Š|‚ŒŽAm…‹‘A‹pŽA‘…ŠA™‚ŒŽ|ˆF€ŽA‡ˆ<ŠA‡—|‚mˆDy€AŠAˆ…‹p…Š|+ƒDŠA€‚ŒŽAl…‹pA‹‘ŽAp…ŠA™‚pŽAˆF€Qƒ<‘€A…‹‘‡A‹‘‹p€…Š‚ŒŽ|…‹:‹p‡‚p…ˆŠŠ3—|pˆ6‡‹‘‹E‹p…<Švƒ<†A‡ˆŠA‹p…‹‘‚p‹Vˆ<€|‚Œp™…ŠA…‹‘‚p…‡”7ƒD‚Œ|p‹}ƒ<Š|€‹`‚Œˆ6‡„Žvƒ<‹`‚Œ…‡šŠ|ˆ…‹‘š‡ˆ™—4ˆ<ŠAŠ3‚]ŽA/•ƒ]†C‚š“vƒ<‹‘€Wv†‚Œp…Š|nŽAƒ<‹”‚pŽAC’‡‚ˆD‡]ƒD—|‚ŒA‘…ŠAn‚ŒŽA/€AC‚Œ‘™@…ŠA…‹`‚Œ…‡œ7ƒD‚Œ|p‹”…Š@ƒp†tƒD‚p…<†x‹p™@ƒ<††FŠA™“'Eˆ<'†ƒ<p”•ƒ]†C‚”‡ˆFC‰‡…Š3‚Œ‹3•œŽA…†€|…‹‘‚pp…“A|‚Œ…ŠA‚pŽAœ‹‘‚Œˆ6‡„Žvƒ<‹`‚Œ…‡‡ˆ<™@—'ˆŠAŠ‚ƒ<™ˆŠAlƒD††3‚ŒŽAy‡ˆ6‰‡…Š3‚Œ‹VƒD‡‡ˆ<p€A…ŠA‚Œˆ…‚Œ‹Š|pDƒD‚z]ƒ<‡„Ž‹‘‡]ƒ<†<Ž|…‹zŠ|ˆ…‹‘‡ˆ<™@—'ˆŠAŠ‚n€Aˆ6‹nŠAˆ<‚n—A‘ˆIF…€A@ƒ<Š3A‹pC7A†E…Š|7ˆ‘™WƒL‚Œ…ˆ<Šƒ<ŠA€…‹?€A…‹‘—4ŠA‹ŒƒD“A†DŽAŠ\‚ŒŽ|•yƒI<†‚‡ˆ6‰‡…Š3‚Œ‹ƒDph‹p™@ƒ<††O‚pŽAM‡]ƒ<Šj“'hˆ™…‚p‚p€\•œ…‚ŒŽAˆ<|‚‹p|“A‹‘‚Œƒ<Š3‚Œ…tƒD††\ƒD’4‡C‚Œ…Š|‚ŒŽ|xŠApƒ<†—A…‡C‚ŒA‘<ŽA‹'‚pŽAnŒƒD‚p…ˆŠvƒD†:“'ŽA…ŠA€‚pŽAp‹pŽAˆ<†€A…ŠA•yƒ]†‚‡ˆ6‰‡…Š3‚Œ‹4ˆ<‘€AŠAˆ…‹p…Š|ƒ<‹x—'n‹p…Švƒ<†V—|pˆ6‡‹‘‹p…ŠA›‚Œp™‹…‹nƒ•yƒ]Qˆ<‡†]ƒDŠA…ŠAˆ|‚AŠA…™@—'ˆ‘‚Œƒ<Š3‚]€AC‚„ƒ<…†‹‡ˆŠA‹p…€A‘€‚Œˆ“4?ŠAˆ<…‹pDŠAEˆ<‚ŒŽAE™‚ŒŽ|ˆF€A‹ˆ
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F<^œšA‘‘A|AAnr !#"%$'&(A‘*)nrpAp=*?A@BDCE;$FHGJIKGJLMONQPSRTURQVXWYRZ\[S]_^Vr`bacZ*Vd#[S]šAAA<p\‘+e) $$) pA2f|p|6.ppp7g.Œ\7p*8ŒA+fihfA‘kjFJ8+p+AAC+K.60X.3Œ$š|m+‘/++f'3~HŒAxpe.A`Œ>7g.Œp+ Œ|l.ApA‘+Al7A‘Œ@p.e7A‘p-nmo7gf4+ŒxpAqpEr+AtsYrpu8@v7ApA@pAx(wyx{zo|~}Œ‘e)‘uf4.Œ-Jm$šA(AA(pA:8-ph%.67AAnŒA+Œ‘++7p*8AjF~>7|++f'3e)+A+8p:++šA+Œ$FHGJIKGJ€5N%TZQacTUNiVdU[S][S‚VƒHRWYRZQd#„R%…S€†[S]‡Vk`[STpZ*VdU[S]šAˆ7%f'+Œ*‰4pŠf++8p‹pErŒ)+ApAAp^f++8p‹sYrŽ)+‘A(7App.*82f%7FŒmpAgf%7|l‘‘Œ|7A$šA.3pp+.p7Œ|AjF~>7|+v.+6.7A+Œh7‘\8w7+ŒA&i$3‘)&g$'’U&g$”“|ef'AAApA:•mf4n<Œ|:um6‘pe8$š|yŒA:‘‘Œ|7yŒ|+7|Œ*8+p6.v.3pp‘$$)—–Ž™77|+›š+œ.„$"

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5Ÿ Y¡†¢†£¤¦£§¨¡/£¤Y£‹¢, ¨A£‹¢†¡ ¨¦¤Y£†‡¢ˆ•tœ%J‹<—*g>eœgˆ>eŠ%>e>Š\t%6%e\Q>>\J6eu‹*uqœeœJ‹%>>>euur›%>rDœeb*>J\%¨\%%nœ6*%¨*/œ%:%uie>œ%J<>%\Qœu\6Je>Yeu*%g66*>Š\iœ6J%eAy›%/>eu%J>›#\"œ%/*"Sk\Šu>%g*uŠ%>>eQ>e'U¢,2KHik>*\\—bK*%ec"buœJ6JK%>>>et%*%"%6Šy{o"—*ueov"%e\Q>>\J6e#\‹qgJœJ%6/6g%gŠq%nœJ%6†\gœggŠ%>e>ueeX›%1lœuœ>%eJe\Q>>\J6e'‹Se#\2*%eŠ\og%#\g•J%%gvb%•bŒ\gœggr‡›%uieuq›g†>*2†›g>eeuXi%6%>Yœ5g*2J%œ%‡u#\uE*gev*œg,k*eJ›"—b>eE%\%"%Jy{ov"—e*>>\J6Š#v"e*>>\J6<1›%Š%>e>v\gœggve—b>6\%v*u**”kn—urgn—n—1r n!"#1$%'&iJk()*\+,-.'—u\/%,-.'—,-.n1,nQ0!"#11$%'&i*%>*!"J"œ%‹>6X6%g1\›u%gq"‡e2Eb>eu*‡>eXkb*œœ*(3Jœg6i"b#›%\iŒ%%n#\>XJ•*2<*"%J>Se3"—*54Y%ueu>%u*3‡\J6u%6%5%kg#\>*-

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6798;:=<>@?ACBDFEG>9BH:1<>@IJBKLMN:=MNBKMNKOQPCRSPT:=>JUWVXZY\[^]`_ba.c5daegfV/hKLXe[^]`_ba.c5iaegfj<>@khEGl>mPnHoBAB:1<>JA2?FhA1hUp>m:=>mA1P2hAC>qrY8_satvuxwfTyVre8_satni-wfTyVy8_{z}|~zfMGL>mK-:=MN:R€U€h0:=A1M‚Vƒ8atnaauVj+8„jhA1O>m:khEGl>JPHoBAn:=<>…AC>JPC?†BKP1>JP+MGKˆ‡‰8Š‹‹Œ`aaauaaŽTV‘\PC:1MGU~h:=>mL“’@hMNK•”8Š‹‹Œuxwa–—au™awiauaaiaiwŽVFhKLš\A1BSIJ>mP1P›’…hMNKœ8Š‹‹ŒuxwŸtni–›i™.tux ™tnŸ—tnŸitnduuititndi- .tvuŽ¡"¢N£ym¤§¦xo¨F…¨Fs.j<>…MGKMv:=MhEkhENl>JPnHoBAn:1<>@?A1BSIJ>mP1P+U~BSL>mE)>mA1>…?A1BkSMGL>JL}hPHoBEGENBx2Pmq›PC>m:‘\PC:1MGU~h:=>9+8Š‹‹ŒudaawaŽTV(hKL3A1MvH§:2‘\PC:1MGU~h:=>@Q"8Š‹‹ŒaaŽj<>MNK?l:?FhA=hU~>Z:=>JACPKB:\hkhMNEhEG>MGK•uxwxhA1>)P1lMv:5hEvRhP1PClU~>mL"KMv:=MGhEGEvR3:=<>?A1BSIJ>JPCPMGP2hP1P1lU~>mLW:1B~>@h:2:5hACO>m:J¡"¢N¨FJS¤bx.j<>p?†>mACHoBACU€hKIJ>BH:=<>)hk>JEN>m:FhP1>mLLBlEN>~‘}2F_2FfIJBK-:1A1BENEG>JAMGP>ghU~MNK>JLHoBAn:1<>9HoBEGENB2MGKOQIJhP1>mPJ—-Ÿ

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n""1p'F\C.mJ"1"+11"+Nm}-b.N'n"./gn""1.F\C.mJ"1"+11"+Nm}-b.N'n"./2v=}"p"W"CN§J“m-=CGNJJF"1G,G"pvJ-\F"1Gb./-g}1="N"pm.JN}\23„/+mGJ""1•'"CG1`"mGZSGoZ=N"JJTo1~"mp""C1m"+"1J“"1919oGNx2N'J1"n.F"CJ3mS"1G@oC195"Cmrr "!$#%'&o2"N"1=")(*',+g-b./..S="F"1/3mS"1G€1@1SJm"1"+1="mJ1""1N=10.3ZS"1G›@›323465r5r8794%'&o2"N"G=";:<„',+-$-+>=?-b.@=-2m1BA„N"n=9=5""†m+C"JCEDGFHJILKMONQPRK›"CGQ"1GQ)"")J"1CGm~.o2'RS,S…C"J›JCo1~"J2=)T+?"=n29m-=CGNJn)""=J"T=m“J2Gm-=GJ""mv=G"JCEDGFODVUHJILKM*NWPXKY[Z]\_^n`9KaIU•1SJm"1"11""1"C2N bG1•.v'1G="""="1N~N"+N@N"9"12"1J›1F"@=T29m-=1GGm9F""…"†Z11J@†mCoC€"JCJNm=NJC1)G1"nonC.mJ"C"+'c"Cm+"C9"12WGdbN1m"2./Q"}.non.=1"'@"WCJ"C†mm=vmNe.N~N"CN,=91JGm1G€J1CnN="o)C.mJ"C"1v§"C9"12GfbG1J"9.@=ˆ"./po3C.mJ"C"1J"'"€1J"C†mm1NmN"hgWGNJ"1J1J"CJ-=n1mGZ=NQJC1C"o11329m-=1GGmi02JC""1nJGCJGNJ"1m1m"1J-=,S

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0 10 20 30 40 50 60 70 80 90 100 0 500 1000 1500 2000 2500 Run NumberProcess outputs W RbR output 1W RbR output 2RbR output 1RbR output 2 Target = 2000 Target = 100 jlkmonprq1stuot]vwprxLyiqazrz.{|n}>~n}>z~?pqi€?k$ya}>k$xoJqaprprx,przƒ‚Qpxo„…}>†?q|‡Tˆ)‰9ˆŠyixo‹}>pxoŒŒ$qipatŽz3†?qƒ‘oqaŒqa})‰?,zrqa€_„’n?Œ$}rk“zryi,Œq,9,Œ”Lzrkza•}r†?q~?pqi€?k$ya}rkxoJqaprpxoprz|–Q‚Qxopex,—zqa}rz3,?€€?pk$‚W}h™w‚Qpxo„…}>†?q‡Tˆ)‰9ˆŠyixo‹}rprxoŒ$Œqip,pq"x,‰?zrqap‘oqa€/}rxB†?R‘,qnŒ$qizzrqip)‘',prk'}>k$xoš‚Qxop3‰x,}r†d}r†?q1xon}r~?n}>zatsu

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0 10 20 30 40 50 60 70 80 90 100 -250 -200 -150 -100 -50 0 50 100 150 200 Run NumberPrediction error for offset W RbRRbR ›lœoŸr 1¡¢¤£¢9wŸ i¦?œ$§a¨>œ$o_wŸrŸr,Ÿ)Q,Ÿ|r ¨)QoŸ)wŸrL§i i||¨r?¨" 0 10 20 30 40 50 60 70 80 90 100 -80 -60 -40 -20 0 20 40 60 80 100 Run NumberPrediction error for offset W RbRRbR ›lœoŸr 1¡¢@¢9wŸ i¦?œ$§a¨>œ$o_wŸrŸr,Ÿ)Q,Ÿ|r ¨)QoŸ)wŸrL§i i||¨r?¨£¡o£

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0 10 20 30 40 50 60 70 80 90 100 -250 -200 -150 -100 -50 0 50 100 150 200 Run NumberPrediction Error for Drift W RbRRbR l$o?"@9wriaro_wroQo)|$WQo)wair|>" 0 10 20 30 40 50 60 70 80 90 100 -80 -60 -40 -20 0 20 40 60 80 100 Run NumberPrediction Error for Drift W RbRRbR l$o?"L9wriaro_wroQo)|$WQo)wair|>,

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0 10 20 30 40 50 60 70 80 90 100 0.7 0.8 0.9 1 1.1 1.2 1.3 1.4 Run NumberInput 1 W RbRRbR l,?"r"1L'¤'??n*,?""L'$o'.o"a">,,"n.?ro$>"1?.|"aL8'roL r?"’""i?$.,Žr?"?"a"."r"iaro_"i""ro"i>?"no"i?"a">'r"i""ii$"1eo?f,9o"$"ir"i"??ar9'>$o?a'w3?$ƒo"a"r9"id>?"|$???,rƒ?R)/$l,?"r"a3'@9L''@š,'@')3?"o"a">,o"’r?,,ro$>""?"aL'>$oQ|13,Er?"nQ,?"$??r.$r,"r"al$o?"r"<'R'’*,?$"'?"r"ar"i‹r"r?"…Q,"|>?"?"a"i"$??ri'n?"ai"r"i,r"3']o""r9,,l,?r"a"o"aQo"l'‹>?"eQo?"l$??r*r>?"ao‹>"r,"a"i'rB'>?"a"3?"rLi"ar)o"i">>,_$>?"1$n,"a"r"ar?'r

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0 10 20 30 40 50 60 70 80 90 100 -2.5 -2.4 -2.3 -2.2 -2.1 -2 -1.9 -1.8 -1.7 -1.6 -1.5 Run NumberInput 2 W RbRRbR n "!# $&% 0 10 20 30 40 50 60 70 80 90 100 1 1.1 1.2 1.3 1.4 1.5 1.6 1.7 1.8 Run NumberInput 3 W RbRRbR n(' "!# $*)+

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0 10 20 30 40 50 60 70 80 90 100 -0.4 -0.38 -0.36 -0.34 -0.32 -0.3 -0.28 -0.26 -0.24 -0.22 -0.2 Run NumberInput 4 W RbRRbR ,-n./0123(4 3 5"67/ 8:9 1 2 3 4 0 2 4 6 8 10 12 InputsAverage Absolute Input Deviation (AAD) W RbRRbR ,-n./0123;=<3>:?1@0BA.+1C>:DEFGn/ 81H5"6 7/ 8:I&1J?-KAL8B-nF6NMJOP;=
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VWXYnZH[\(]\^:X_`Yna bZdceaWfZHg&ZJhinWbBi`+jlkm`+fnoVWfqp+ZJbdrtsvu=wxTy VzWXYZH[\|{ \}cbBWj~mWfq~g&ZthiKWbin`+j€`‚bBƒ ZC„…fq`†JZ@__*‡&a bBˆ a bB_ V‰ƒin_C~infqZ@†tbBYŠ‹fqZ@_qaYb_ŒinjWŽn`+fZ_qbBWXYnZˆf`†@ZJ__Œˆ‘Z@f’“`+fnWj†JZ\lVzWXYnZJ_”[\(]ŽWj~•[\|{_ƒ `—–bBƒZj™anZ@fi†šWY›hWYnaZJ_v`^&c gœWj ~cbBWj~mWf~Žg&ZJhiKWbin`+j“`f‰X›`bƒ€bBƒZH†@`+jbf`+YYnZ@fq_@\V‰ƒZ Ÿ¡vXm¡¢†J`+jbBf`YnYnZJf”in_`+X_qZ@fqhZ@~£b`X‘ZŽX‘ZJbqbBZ@f¤bBƒWjbƒZ¡v¦§¡¢†@`j™bf`+YYnZJf¤–Pi¨bBƒfZT_ˆ‘Z@†tbPbB`”bBƒZ_’bWj ~mWf~ ~ZthinWbBi`+j€injbƒZˆf`†@ZJ__P`+a bˆa b_:Wj~l^c gŒ\^:_PWjlinYYna_’bBfBWLbBin`jbBƒ Z^c g“f`+nbBƒ ZbWfqp+ZJbdin_H`+X_qZ@fqhZ@~bB`X›ZYZ@_q_Z@fCXŠu—]\({ u=“`fCˆfq`†JZ@_q_”`+a bBˆ a bu+\ciniYKWfqYŠ+bƒZ_qbWj~mWfq~Ž~ZthiKWbin`+j“`+f‰`a bBˆabCui_‰`+X_ZJfqhZ@~b`X‘ZYn`=–Z@f‰XŠ  \|{+\‚šz—”} CmJ ^nZ@Wj”_ƒ ib…`‘nWp+ji¨bBa~ Z*u=w+ww*“`+f…„…f`†@ZJ__PuPWj~[w+wv“`+f…„…f`†@ZJ__]WfZ§pZ@jZJfBWbZ@~WbfqajCj™andX›ZJf[w \V‰ƒZˆ f`†@Z@_q_`+a bBˆ a bB_zWfZ…ˆ Yn`bqbBZ@~ijCkzinp+afqZ[\¨u+u+\‚^*_†šWjHX‘Z`+X_qZ@fqhZ@~“f`nbƒZp+afZbBƒ ZŸ¡vX¡†J`+jbBf`YnYnZJfzi_‚W_qbBZJfijŒXfijp+ijpvbƒZˆ f`†@Z@_q_…XmW†bB`&†J`+jbBfq`+Y"\ciniYKWf‚bB`d"§W_Zu+bƒZP–§Wšh+ZJYnZtbXmW_Z@~nŒaY¨bBin_q†šWYZ§bBfqZšWbnZJj™b`›bBƒZPˆfqZ@~i†Jbin`+jZ@fqf`+fq_ƒmW_fZJ_aY¨bBZJ~injYnZJ__qZ@fdhWfqiKWbin`+jinjWYYbƒZ“`+a fŒˆf`†@ZJ__”ijˆa b_dbB`bƒZŸ¡PXm¡o†J`+jbBf`YnYnZJf@_a nnWfi'@ZJ~ŽijVzWXYnZd[\\‰V‰ƒZŒ^:^&gœ~ Z@†@fqZšW_qZ@~XŠ n`fZbBƒmWj[wijWYYbBƒZCinjˆabB_@\V‰ƒi_†@WjWY_`HX›Zv†@`j mfnZ@~“f`+nkzinp+afqZv[\¨u—]™_ƒ`=–Pijp”WYn`=–ZJfnWp+j ibBa ~ZP`^:^&g“`fWYY›bBƒ Z“`afPinjˆabB_@\[+

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0 10 20 30 40 50 60 70 80 90 100 -500 0 500 1000 1500 2000 2500 3000 Run NumberProcess outputs W RbR output 1W RbR output 2RbR output 1RbR output 2 Target Target zn+q¨++m…qJ@*& B B:: @:Žš znH| :+JBC:+ B" :&JKn+Ntvš™

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nrr r!"#n%$'&)(%*r%$+,-./$n"(10-23546798 1 2 3 4 2 4 6 8 10 12 14 16 InputsAverage Absolute Input Deviation (AAD) W RbRRbR :; r#<=>%? r!@"#n%$A>BCD'+,>n$"(ED"FG:$0HIA>+8'02JK4L8 :NMrO#"PQ??+SRrn@T$#UE(%VDr-(rT-!,$Mr*r"T-!!,*WYXZ"F[(rT-@!@r#$n(r[n(\]#n-!!-IA>+^(rR_!@$(rRD@R_R%-.$n"(`n(a$Mrb*%"T!@!c">$*r%$!dXZ@"F$Mr1e`f3 DfgT-"(h$"#n#n-:NMr-!<@!@r#$!?@!rF]Finj-REn(k$ r#n-!>=l(rR\>nm%oD"N9p%F[*%#nqD(E*r"T-!!?"%$*r>$>qN$M%rIA%+sRr-T!-R_ hUut%vtwhxySAnF]n#.#Uqz$Mr\!Y${(rRrR|Rr>n$"(uRr-T@K!@R` CU>n4whx}n(rRrTK$n(rO]!@F[""$M%N*r@">T-!!J*W@XZ"F[(rTt

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