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High voltage conversion for MEMS applications using micromachined capacitors

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Material Information

Title:
High voltage conversion for MEMS applications using micromachined capacitors
Physical Description:
Book
Language:
English
Creator:
Khanna, Puneet
Publisher:
University of South Florida
Place of Publication:
Tampa, Fla.
Publication Date:

Subjects

Subjects / Keywords:
dc-dc converter
porous silicon
MEMS
switched capacitors
Dissertations, Academic -- Electrical Engineering -- Masters -- USF
Genre:
government publication (state, provincial, terriorial, dependent)   ( marcgt )
bibliography   ( marcgt )
theses   ( marcgt )
non-fiction   ( marcgt )

Notes

Summary:
ABSTRACT: This thesis explores high voltage converter circuits for MEMS applications using micromachined devices. A novel MEMS based tunable DC-DC converter has been developed. Conventional high voltage converters based on charge pumps are unable to convert voltages to higher than few tens of volts due to power handling limitations of the CMOS components. In order to overcome this limitation a high voltage circuit has been proposed, which when integrated with micromachined switches will generate output voltages in the range of 100 Volts. The converter is based on a two phase switched capacitor circuit, and allows regulation of voltage conversion ratio. Three prototype circuits have been built for proof of concept. A test program has been written for synchronized CPLD based control of the switched capacitors. Individual capacitor fabrication technology is explored using two methods - Porous Silicon and DRIE processing.A micromachined capacitor bank has also been fabricated in silicon using a novel process sequence which provides for critical real estate savings and integration benefits. It enables on-chip integration of numerous microcapacitors, without losing customized configurability of the capacitor bank. The technique utilizes polyimide to facilitate lithography on a highly contoured surface. Plain capacitors have been fabricated on silicon with oxide-nitride-oxide stack being used as the dielectric to provide a building block for further fabrication of a variety of capacitors.
Thesis:
Thesis (M.S.E.E.)--University of South Florida, 2004.
Bibliography:
Includes bibliographical references.
System Details:
System requirements: World Wide Web browser and PDF reader.
System Details:
Mode of access: World Wide Web.
Statement of Responsibility:
by Puneet Khanna.
General Note:
Title from PDF of title page.
General Note:
Document formatted into pages; contains 128 pages.

Record Information

Source Institution:
University of South Florida Library
Holding Location:
University of South Florida
Rights Management:
All applicable rights reserved by the source institution and holding location.
Resource Identifier:
aleph - 001498273
oclc - 57719240
notis - AJU6878
usfldc doi - E14-SFE0000551
usfldc handle - e14.551
System ID:
SFS0025242:00001


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Full Text
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High voltage conversion for MEMS applications using micromachined capacitors
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ABSTRACT: This thesis explores high voltage converter circuits for MEMS applications using micromachined devices. A novel MEMS based tunable DC-DC converter has been developed. Conventional high voltage converters based on charge pumps are unable to convert voltages to higher than few tens of volts due to power handling limitations of the CMOS components. In order to overcome this limitation a high voltage circuit has been proposed, which when integrated with micromachined switches will generate output voltages in the range of 100 Volts. The converter is based on a two phase switched capacitor circuit, and allows regulation of voltage conversion ratio. Three prototype circuits have been built for proof of concept. A test program has been written for synchronized CPLD based control of the switched capacitors. Individual capacitor fabrication technology is explored using two methods Porous Silicon and DRIE processing.A micromachined capacitor bank has also been fabricated in silicon using a novel process sequence which provides for critical real estate savings and integration benefits. It enables on-chip integration of numerous microcapacitors, without losing customized configurability of the capacitor bank. The technique utilizes polyimide to facilitate lithography on a highly contoured surface. Plain capacitors have been fabricated on silicon with oxide-nitride-oxide stack being used as the dielectric to provide a building block for further fabrication of a variety of capacitors.
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