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A novel normal-to-plane space efficient micro corner cube retroreflector with improved fill factor


Material Information

A novel normal-to-plane space efficient micro corner cube retroreflector with improved fill factor
Physical Description:
Agarwal, Rahul
University of South Florida
Place of Publication:
Tampa, Fla.
Publication Date:


Subjects / Keywords:
Multiple wafer bonding
Wet etching
Optical communication
Dissertations, Academic -- Electrical Engineering -- Masters -- USF   ( lcsh )
government publication (state, provincial, terriorial, dependent)   ( marcgt )
bibliography   ( marcgt )
theses   ( marcgt )
non-fiction   ( marcgt )


ABSTRACT: A Corner Cube Retro-reflector (CCR) is a device that can be used as transmitters in wireless free space optical communication systems, or remote sensing instruments. A novel approach to fabricate the CCR is developed, where almost 100$\%$ of the planar chip area acts as the CCR compared to the maximum of 33$\%$ in the prior MEMS CCRs. Unlike the conventional micro machined CCRs that have two planes (mirrors of the CCR) normal to the surface of the wafer, our approach yields all the mirrors within the bulk of the wafer, ensuring very high packing densities and wide acceptance angles. The crystallography of single crystal silicon wafer along with different micromachining and wafer bonding techniques are used to fabricate and assemble the CCR. The solid models of both the active and passive CCRs were built using Coventorware simulation software. In the active CCRs, one of the mirror was electrostatically actuated; this is simulated using the software.
Thesis (MSEE)--University of South Florida, 2003.
Includes bibliographical references.
System Details:
System requirements: World Wide Web browser and PDF reader.
System Details:
Mode of access: World Wide Web.
Statement of Responsibility:
by Rahul Agarwal.
General Note:
Title from PDF of title page.
General Note:
Document formatted into pages; contains 99 pages.

Record Information

Source Institution:
University of South Florida Library
Holding Location:
University of South Florida
Rights Management:
All applicable rights reserved by the source institution and holding location.
Resource Identifier:
aleph - 001681116
oclc - 62783413
usfldc doi - E14-SFE0000629
usfldc handle - e14.629
System ID:

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Full Text
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Agarwal, Rahul.
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A novel normal-to-plane space efficient micro corner cube retroreflector with improved fill factor
h [electronic resource] /
by Rahul Agarwal.
[Tampa, Fla.] :
b University of South Florida,
Thesis (MSEE)--University of South Florida, 2003.
Includes bibliographical references.
Text (Electronic thesis) in PDF format.
System requirements: World Wide Web browser and PDF reader.
Mode of access: World Wide Web.
Title from PDF of title page.
Document formatted into pages; contains 99 pages.
3 520
ABSTRACT: A Corner Cube Retro-reflector (CCR) is a device that can be used as transmitters in wireless free space optical communication systems, or remote sensing instruments. A novel approach to fabricate the CCR is developed, where almost 100$\%$ of the planar chip area acts as the CCR compared to the maximum of 33$\%$ in the prior MEMS CCRs. Unlike the conventional micro machined CCRs that have two planes (mirrors of the CCR) normal to the surface of the wafer, our approach yields all the mirrors within the bulk of the wafer, ensuring very high packing densities and wide acceptance angles. The crystallography of single crystal silicon wafer along with different micromachining and wafer bonding techniques are used to fabricate and assemble the CCR. The solid models of both the active and passive CCRs were built using Coventorware simulation software. In the active CCRs, one of the mirror was electrostatically actuated; this is simulated using the software.
Co-adviser: Bhansali, Shekhar
Co-adviser: Samson, Scott
Multiple wafer bonding.
Wet etching.
Optical communication.
0 690
Dissertations, Academic
x Electrical Engineering
t USF Electronic Theses and Dissertations.
4 856


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