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A novel normal-to-plane space efficient micro corner cube retroreflector with improved fill factor

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Material Information

Title:
A novel normal-to-plane space efficient micro corner cube retroreflector with improved fill factor
Physical Description:
Book
Language:
English
Creator:
Agarwal, Rahul
Publisher:
University of South Florida
Place of Publication:
Tampa, Fla.
Publication Date:

Subjects

Subjects / Keywords:
Multiple wafer bonding
Coventor
Wet etching
Crystallography
Optical communication
Mems
Dissertations, Academic -- Electrical Engineering -- Masters -- USF   ( lcsh )
Genre:
government publication (state, provincial, terriorial, dependent)   ( marcgt )
bibliography   ( marcgt )
theses   ( marcgt )
non-fiction   ( marcgt )

Notes

Abstract:
ABSTRACT: A Corner Cube Retro-reflector (CCR) is a device that can be used as transmitters in wireless free space optical communication systems, or remote sensing instruments. A novel approach to fabricate the CCR is developed, where almost 100$\%$ of the planar chip area acts as the CCR compared to the maximum of 33$\%$ in the prior MEMS CCRs. Unlike the conventional micro machined CCRs that have two planes (mirrors of the CCR) normal to the surface of the wafer, our approach yields all the mirrors within the bulk of the wafer, ensuring very high packing densities and wide acceptance angles. The crystallography of single crystal silicon wafer along with different micromachining and wafer bonding techniques are used to fabricate and assemble the CCR. The solid models of both the active and passive CCRs were built using Coventorware simulation software. In the active CCRs, one of the mirror was electrostatically actuated; this is simulated using the software.
Thesis:
Thesis (MSEE)--University of South Florida, 2003.
Bibliography:
Includes bibliographical references.
System Details:
System requirements: World Wide Web browser and PDF reader.
System Details:
Mode of access: World Wide Web.
Statement of Responsibility:
by Rahul Agarwal.
General Note:
Title from PDF of title page.
General Note:
Document formatted into pages; contains 99 pages.

Record Information

Source Institution:
University of South Florida Library
Holding Location:
University of South Florida
Rights Management:
All applicable rights reserved by the source institution and holding location.
Resource Identifier:
aleph - 001681116
oclc - 62783413
usfldc doi - E14-SFE0000629
usfldc handle - e14.629
System ID:
SFS0025319:00001


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Full Text
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ABSTRACT: A Corner Cube Retro-reflector (CCR) is a device that can be used as transmitters in wireless free space optical communication systems, or remote sensing instruments. A novel approach to fabricate the CCR is developed, where almost 100$\%$ of the planar chip area acts as the CCR compared to the maximum of 33$\%$ in the prior MEMS CCRs. Unlike the conventional micro machined CCRs that have two planes (mirrors of the CCR) normal to the surface of the wafer, our approach yields all the mirrors within the bulk of the wafer, ensuring very high packing densities and wide acceptance angles. The crystallography of single crystal silicon wafer along with different micromachining and wafer bonding techniques are used to fabricate and assemble the CCR. The solid models of both the active and passive CCRs were built using Coventorware simulation software. In the active CCRs, one of the mirror was electrostatically actuated; this is simulated using the software.
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