A novel normal-to-plane space efficient micro corner cube retroreflector with improved fill factor

Citation
A novel normal-to-plane space efficient micro corner cube retroreflector with improved fill factor

Material Information

Title:
A novel normal-to-plane space efficient micro corner cube retroreflector with improved fill factor
Creator:
Agarwal, Rahul
Place of Publication:
[Tampa, Fla.]
Publisher:
University of South Florida
Publication Date:
Language:
English

Subjects

Subjects / Keywords:
Multiple wafer bonding
Coventor
Wet etching
Crystallography
Optical communication
Mems
Dissertations, Academic -- Electrical Engineering -- Masters -- USF ( lcsh )
Genre:
government publication (state, provincial, terriorial, dependent) ( marcgt )
bibliography ( marcgt )
theses ( marcgt )
non-fiction ( marcgt )

Notes

Abstract:
ABSTRACT: A Corner Cube Retro-reflector (CCR) is a device that can be used as transmitters in wireless free space optical communication systems, or remote sensing instruments. A novel approach to fabricate the CCR is developed, where almost 100$\%$ of the planar chip area acts as the CCR compared to the maximum of 33$\%$ in the prior MEMS CCRs. Unlike the conventional micro machined CCRs that have two planes (mirrors of the CCR) normal to the surface of the wafer, our approach yields all the mirrors within the bulk of the wafer, ensuring very high packing densities and wide acceptance angles. The crystallography of single crystal silicon wafer along with different micromachining and wafer bonding techniques are used to fabricate and assemble the CCR. The solid models of both the active and passive CCRs were built using Coventorware simulation software. In the active CCRs, one of the mirror was electrostatically actuated; this is simulated using the software.
Thesis:
Thesis (MSEE)--University of South Florida, 2003.
Bibliography:
Includes bibliographical references.
System Details:
System requirements: World Wide Web browser and PDF reader.
System Details:
Mode of access: World Wide Web.
General Note:
Title from PDF of title page.
General Note:
Document formatted into pages; contains 99 pages.
Statement of Responsibility:
by Rahul Agarwal.

Record Information

Source Institution:
University of South Florida Library
Holding Location:
University of South Florida
Rights Management:
All applicable rights reserved by the source institution and holding location.
Resource Identifier:
001681116 ( ALEPH )
62783413 ( OCLC )
E14-SFE0000629 ( USFLDC DOI )
e14.629 ( USFLDC Handle )

Postcard Information

Format:
Book

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Full Text
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ABSTRACT: A Corner Cube Retro-reflector (CCR) is a device that can be used as transmitters in wireless free space optical communication systems, or remote sensing instruments. A novel approach to fabricate the CCR is developed, where almost 100$\%$ of the planar chip area acts as the CCR compared to the maximum of 33$\%$ in the prior MEMS CCRs. Unlike the conventional micro machined CCRs that have two planes (mirrors of the CCR) normal to the surface of the wafer, our approach yields all the mirrors within the bulk of the wafer, ensuring very high packing densities and wide acceptance angles. The crystallography of single crystal silicon wafer along with different micromachining and wafer bonding techniques are used to fabricate and assemble the CCR. The solid models of both the active and passive CCRs were built using Coventorware simulation software. In the active CCRs, one of the mirror was electrostatically actuated; this is simulated using the software.
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