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Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical ...


Material Information

Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical mechanical planarization process modeling
Physical Description:
Lallave-Cortes, Jorge C
University of South Florida
Place of Publication:
Tampa, Fla
Publication Date:


Subjects / Keywords:
Steady state
Transient analysis
Conjugate heat transfer with spinning boundaries
Slurry abrasive particles
CMP temperature distributions
Dissertations, Academic -- Mechanical Engineering -- Doctoral -- USF   ( lcsh )
non-fiction   ( marcgt )


Dissertation (Ph.D.)--University of South Florida, 2009.
Includes bibliographical references.
System Details:
Mode of access: World Wide Web.
System Details:
System requirements: World Wide Web browser and PDF reader.
Statement of Responsibility:
by Jorge C. Lallave-Cortes.
General Note:
Title from PDF of title page.
General Note:
Document formatted into pages; contains 295 pages.
General Note:
Includes vita.

Record Information

Source Institution:
University of South Florida Library
Holding Location:
University of South Florida
Rights Management:
All applicable rights reserved by the source institution and holding location.
Resource Identifier:
aleph - 002029667
oclc - 437033959
usfldc doi - E14-SFE0002968
usfldc handle - e14.2968
System ID:

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Full Text


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n B< n nnn: nn$nn'?nnnn n nnn%nnnF1?n


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n >B n &nr!nnn!n0n!nnn nnnn%nn! nn!n nnn!nnnnnn n'&n r%n<&Bn0n'nnnn<&12&n "n;n#+n0nn :O?n rnnIHn4&=n :/?n r!H4nnnnIHn4&=n:/?n )&<&B&An :O?n 1n<=(A5013nHn>&>(14&>(14=n<<<&43=13An nA&2(14&n r!nnn%nn nn!n%nnnnn1< ==&nnnn1<==n n'nnnnnn !nn2>4nn1B44n&n r!n'nnnn n4&43==O&n(nnn n%nn!n nn,n% n!n nnn! nn!.n nnn !$n!nnn!n!n&nr! nn!nn n nnnnnn1<==n&n nnnn

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n >2 n 35B 35B&A 352 352&A 35> 35>&A 355 355&A <44 <44&A <41 K1K4&2AK4&AK4&3A44&3A4&A4&2A1nn nnI n nDnr/ <34n 2>4n 1<==n 1B44n 3<4=nn) rn) n n<&1>nrn%nn!n nn%!n!n%n nn'n%nnn:JHBAnIn H1An"#n H1A4n"#n9H4&=n HA4n nH3=&
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n 54 n %nn$&nnn%nn!nn!n %nn!.nn !n n!nnnn!n nn 'nnn!nnn !.&nr!nnnn'n$&nr!n !nnn%'nn!n n'nnnn !n!n7 nnnn&nF12G&n 4&4B 4&45 4&13 4&1A 4&1> 4&31 4&3= 4&32 4&< 4&<< 4&44n n=&3nnn!!n%nn n"n%n !n n n!nn1n:).H3&BA714=n H3&B2n%IH4&A?&n n n=&3nn!nnn!!n% nnn"n %n !n!n,n.n!nnn!n. n !nnnnnnnn13An "#&nnn%nn!n!nnnn nnn 'n!n&n(n!n "n%nn!nn!nn! .nn!nnn nnnnnnn'n !nnnn!!nn 'nn!n&nn!nn nn!nn'n!n n nnnn!n,nnn n !n!nn&n r!n%'nnnn !n!n7 n .nn#$nn&nF<2G&n

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n 5= n !nnnnn !n!nnn!nn nnn!n!nnnn' n,nn!n &n r!n'nn%nn!nn n'nnnn n).n%nn!!nnn n" n%nn! nnn =&B&n(n!n).n%nnn3&BA714=nn3&31714An!n'nn %nn!nnnn%n n'n32&1AOnn!!n "n%n:"H1A44?nn1<&15Onn n" n%n:"H2A4?n !nn 'nnn34&12Onn&n 4 = > 13 1B 34 3= 3> 4&)U44A&)K4A1&)K4=3&)K4=3&)K4=<&)K4=<&)K4= +n9:+ 99:94 <444 B444 5444 13444 1A444 >nn:" <8;&?= nn"H1A44 nn"H2A4 nn"H1444 !nn"H1A44 !nn"H2A4 !nn"H1444n n=&Bn('nn%nn!n nn'n !n ).n%nnnn n !n nn!n nn: H3&B2n %IH4&A?&n n r!nnn.n!.n'nn!n nnn nnnn%nn! nn n=&2&nn

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n 5B n 'nn.n!.&n!nnn %n'nn%'nnn nnn:I?nnn!n4&Annn'&nr!nn n %n'n nn%nn!!nnn! n'nn!nn$&n 4 3A A4 2A 144 13A 1A4 12A 344 33A 3A4 32A 44&A11&A33&A<<&A==&AAA&ABB&A nn!n:;n99:9 \HB&<<< \HA&4BB \H<&B34 \H<&1B2 \H3&A<< \H3&111n n=&>nnn%n%nn n$$nnnn n n !n nn!nnn:"H1 444n).HB&B3714An H3&B2n%IH4&A?&n nn=&>n! n!nnn%n% nnnnn nnn:I?nn!nnnnn .n nn$$nnn: ?nn3&11nnB&<
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n 5> n %nn!n!nn!!nn nn!nn nnn nn!nn% nnn!nnn!nn !nnnn!nnnn!n% nn&n(nnn!n 'nnnnnn!!&n nnn7nn!n n!!nnn!n!n n'n!nnn nn!nnnn$$n7nn n.nnn!nn nn%nn&nr!n%' nn !nnnn 'nn%n9 nF1=44 44&A11&A33&A<<&A==&AAA&ABB&Ann!n:;n99:94 4&1 4&3 4&< 4&= 4&A 4&B 4&2 4&> 4&5 1 1&1 nn%n#: n nn<:1&35? n34:HA&=5? nK22:3<&BB? n#K2>4>:H13=&==? 4>nr <:H1&35? 39:HA&=5? nK22:H3<&BB?#K2>4>:H13=&==? 4>nrn n=&14nnn%nnn nn'n nnnnnnn!n .nn:"H2A4n H13An "#n H3&B2n%IH4&A?&n nn=&14nn!nnn nnnn %n%nnnnn .n n: ?n !n!n!nn !n!'n%nnn'n!n nnnn

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n 1<1 n nnnn.n:).H ?&nr!nnnnn!n 7nnn!n7&nnA&5n n!n'nnnn %n%nn!nn n%nn!nn !n!n n'nn!n7n&nr !nnnn!nn 'nn%n nn-nOnnHn::'nn'?I'?n. 144&n n!nn!nnn7 nn:!nn nnn3&=BOnn<&<3O?nn nn $nnnnnn !nn!nnnn &n(nnn!nn%n n%n#nn&nFB5G&n 344 3=4 3>4 <34
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n 1<< n n !nn'n!!n!n' nn131&=nDI/&n(nnnn A&14n!nnn!nnn!n' nn%nnnn n&nF&<=O&nr!n 'n !n'%n7nnn 'nn'nnnn!n %n%nnnn &nn1&7#nnnnn8r" nn r!nn%n!n!nn! nnnnn,n nnnnn.&n nA&11n! n!n'nnn n%nnnn nn%nn n"n%nnn nn n:).H=&3A714=?&n(nnn %n%nn!%n!n !nn .nn!nn&nnn%n n! 'n!nnnnn nnnn!n.nn !n!nn'nnnn%nn!n nn&nr!n'nnn !nnn!nn.nn%n%' nnn"H2A4nn !!n n!nn%nnI`n4&Bn%n!!nnn !n!nn! n

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n 1<= n "n%nn1444&nr!nnnnA&11n 'n!nnn nn !n,n'n:n" n%?&n 4 1A <4 =A B4 2A 54 44&14&34&<4&=4&A4&B4&24&>4&51 n"nnI nn% 4 4&4= 4&4> 4&13 4&1B 4&3 4&3= 4&3> 4&<3 4&
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n 1<2 n r!nnnn!nnn%nnn nnnn nnnA&1 13 1B 34 3= 3> <3 44&14&34&<4&=4&A4&B4&24&>4&51nn!n:;99:9 +,) +,)( +,)( +,)n( +,)( +,)( +,)( ).nHn ).nHn=&3A714K=).nHn3&1<714K=).nHn1&=3714K=).nHn1&4B714K=).nHn>&A4714KA).nHn2&4>714KAn nA&1
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n 1<> n 4 4&41B 4&4<3 4&4=> 4&4B= 4&4> 4&45B 4&113 4&13> 4&1== 4&1B 44&14&34&<4&=4&A4&B4&24&>4&51nn!n:; nn%n#: +,)( +,)( +,)( +,)n( +,)( +,)( +,)( ).nHn ).nHn=&3A714K=).nHn3&1<714K=).nHn1&=3714K=).nHn1&4B714K=).nHn>&A4714KA).nHn2&4>714KAn nA&1=nnnn %nnnn.n !n nn!nnnnn).n% n:"H2A4n H<&4n %IH4&3A?&n n r!n!nnn%nnnn nnn%n !nnnn'n,nn! n!n.n&nr!nn 'nnnn%n !n7nn n'nnn,nn nnnnnn'n' nnn!nnn!n.&n r!nnn.n!.n'nn!n nnn nnnn%nn! nn nA&1AnnA&1Bn'&nn !nnn!n%nnn!n.n nn nn!nnnn "n%nn1A44nnnnn
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n 1<5 n 4&43A 4&4A 4&42A 4&1 4&13A 4&1A 4&12A 4&3 44&14&34&<4&=4&A4&B4&24&>4&51nn!n:; nn%n#: n 3) 3) 3) 3) 3) 3) %InHn4&3A %InHn4&A4 %InHn4&2A %InHn1&44 %InHn1&3A %InHn1&B2nnA&1Annnn %nnnn.n !.n !n nn!nnn:"H1A 44n).H1&A3714=n H3&4?&nnD!nnn nn!nnn n!!n nn n%&nr!nnn7nn!n n!nnn!n.nn nn!n n nnn!nnnn!n&n nn%nn!n!n.n!.n 'nnn !n!n!nn nnnn IH4&BA&nr!.n.nnnn nnnn nnnn !n!n.&nr!n nn%nnnnA&1Bn !nn !n!n'nn.n! .&nnnnnn'n!n!n n%nn'nn!nn!.n nnnn !n!!n n%nn%nnnn' nn!n%n&n

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n 1=4 n 14 1A 34 3A <4
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n 1=1 n 4 4&4< 4&4B 4&45 4&13 4&1A 4&1> 4&31 4&3= 4&32 4&< 4&<< 4&4&51nn!n:; nn%n#: n ]H4&3A ]H4&A4 ]H4&2A ]H1&44 ]H3&44 ]H<&44 ]H=&44 ]HA&44n nA&12nnn%nnnn.n !n nn!nnnnn$$nn nn:"H2A4n ).H=&3A714=n%IH4&3A?&n n 4 = > 13 1B 34 3= 3> <3 A3 44&14&34&<4&=4&A4&B4&24&>4&51nn!n:;99:9 ]H4&3A ]H4&A4 ]H4&2A ]H1&44 ]H3&44 ]H<&44 ]H=&44 ]HA&44n nA&1>nnn%n%nn nn.n !n nn!n nnnn$$nnn n:"H2A4n).H=&3A714=n %IH4&3A?&n

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n 1=3 n (n!n$$nn'n nn!n.n: H4&3A1?n!nnn%n &nr!nnnnnnn!n n'nn!nn.&n (nn!nnnn!n,nn nn'nnnn!!n!n 7nnn% nnn n.nn!%nnn &nr!nnnn%nn nn H1nnn!n!n n!n'n !n!&nr!n$$nn nnn H3nnnn 7nn!nn,n n !n!n nn nnn!!n!n n&nr!nnnn!nn n%n'nnnn !n H3&nr!n%'nnn !n!n'n n%nnnnF2=Gnnn n,nn !nnn.&nn 4 4&4< 4&4B 4&45 4&13 4&1A 4&1> 4&31 4&3= 4&32 44&14&34&<4&=4&A4&B4&24&>4&51nn!n:; nn%n#: n .445&". 6.$+ / 4":H1&35n).H<&<714KA? :HA&=5n).H1&A3714K=? :H3<&BBn).H1&A714K=? :H13=&=n).H1&2714K
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n 1=< n nA&15nn!nn nnnn n!nn .nn: ?n !n!n! nn!n!'n%nn n'n!nnnn n:4>?nnn"n%nn1444 &n)'n!!n!nnn : ?nn!nnn n nnn4>&nnn%nn!n%!nnn nn!!nn nn%nnn !n#2>4>nn22&nDn nnn'nnn nnn!nnn!n .&nr!n nnn'nnnn nnnn IH4&BA&nn 4 14 34 <4 =4 A4 B4 24 >4 54 144 114 44&14&34&<4&=4&A4&B4&24&>4&51nn!n:; 99:9 .445&". 6.$+ / 4":H1&35n).H<&<714KA? :HA&=5n).H1&A3714K=? :H3<&BBn).H1&A714K=? :H13=&=n).H1&2714K
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n 1=A n r!nnnn nnnn%n %nnnnnnn nnn:I?nnn!n 7nn7nnn nn !n nn!n .n nnnnnA&31&nr!nn n nnnnnnn nnn'nnn n!'nn! !nnn"n%nn1444n n).n%nn=&3A714=&n "nnnn:$n!.nn!n .?nnnnnn!n7n n,n&nr!nn%n n'n! n!n!n 'nn!nnn!n!n7n %n!nn!nnn &nnn%nn!nnn! n!n nnn!n n7nn!n!!nn!nnn n!n.&nn r!nnn'nnn nnnnnnn n!n'&n(n!n!n 'nn!n!nn !n!nn%n nn!nn n%nnnn nn!nnnnnn &nr!n'nn!n'nn!n nnnnnnnnn nn nn!nnn !n'nnn!nnn nn&n nn 'n%n!nnnnnnA&31n nnn !n n!n '&n(n!n!n'nn nnnnn%n %nn%&n 9nn!nnn!n .n nn'nn 'nnn!n'n!n n&n(nnn!n' nn%n n'nnn nn!n'nn$$nn nn.n!.n).n

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n 1=B n %nn"n%nnnnn !nn!nnn nn,nnn&n(n n!n%nn!n nnn%nnn!n nn 'H1&52B3 n 4&41nn "4&2An ). 4&111n :%I? 4&4An 4&B5nnnnnnnnnnnnnnnnn:A&3?n n'n!nnn'n n%nnnn !n'nnnn n&n9 nnnnn n n!nn nn%n!n%nn' n!nnnnn!n n n&nnA&33n'n!nn % n!nn'n n%nn'nn%n n%nnA&3&nn 4 A 14 1A 34 3A <4

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n 1=2 n r!nnnn!nn'n n%n nn-n OnHn::'nn'?I'?n. 144&nr!n'nn%n'nn!n nn1<&>OnnU1A&O&nr!nnn!n n'%nn-nA44n^"^n1A44n= &3A714An^).^n1&4B714=n4&3An^ ^n AnHA&=5n4&3An^%I^n1&B2nn332&Bn^ ^nB32&B&nn!n%nnnnA&33n !nnn%nnnnn n n%nnA&3&nr!nn 'nn'nnn!nnn' n!nnnn n,nn !nnnn .&nr!n,nn% n nnn!nn'nn!n nnn !n!nn nnnn'nn!n nnn!nn.nn!n $$nnnnnnnnn!n &n r!n!nnnn!n'nn!n nn n!n n .nnn%n+!$nnrnF BGn..'nn&nFB>Gnnnn &nF12Gnnn !nn%nn !nnn&nr!nn n nn!n'nnnn,n nnn!nnn nnn!n7&nr!n!n nnnnn %nnn!nnnn n"n%nn! nnn A&3<&nr!nn! nnnA&3&12Onn+!$nn rnFBGn !nB&B2Onn..'nn&nFB>Gn n !nB&2AOnnnn&nF12G&nn nn

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n 1=> n 14 1B 33 3> <= =4 =B A3 A> B= A442A4144413A41A4412A4 !n9:!nn9n:9 ).nHn ).H +!$nnrnFBG ..'nn&nFB>G nn&nF12G nn).nHn1&4B714K=nnnn).nHn1&A3714K=n:).nHn n:).nHn n:).nHn 'n nA&3Gnnnn&nF12Gn !nnnn nn"nn).%n:H1&3nn%H4&&=4On' &nn!n!n $nnnnn!n nnn%nn!nn nnnn&nn

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n 1A4 n nn!nn,n7nn!nn nnn!n!nnn n!nn&nr!nnn nn!nnn!n%nn !nn54&n(n!n!nnnnn nn!!n'n n,n !n!nnn&nnn%n n!nn!n%nn!.n n nn!nnn n!n nn'n nn!nnn!.&nr!n nn%'nn!nn'n!n nnn'n n !nnn nn!n&nr!n'nn!n 'n$n! nn%nnnnn n'nn!nn nnn7nn!nn&nr!n% nn'nnn!n 'nn!nnnnnn nn!n.&nnn%nn 'n!nnnnnnn nn!n.nn!n!n n'nnnn%nn!nnn &nr!n!nnn%'n n!nn'nnnn !n !n7nnnn&nF12G&n nB&3nn!nnn!!n% nnnnn.n nn !n!n,n.n!nn n!n.n !nnnnnnn n13An"#n:).H=&3A714=?&nnn%nn!n!nnnn nnn!n &nr!nn!.nnn!nnn .nnnnn !nnnnn n&nr!n%!' nnnnnnn nn'nn!nn!n nnn!nn'n!n n$nn'n &nD!nnnn!nnn n%!n n n n!nnn nnnn!.&nn!n nnn!nn' nnnnnn!!nn nIPn4&<<
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n 1A3 n !n.&nr!nnnn!n'nn! n%nnn!nn'n nn!nnn!n.&nr!n!. nn!n!n%nn n !nnnn!nn nn&n(nnn %n%nn!%n!n !nn .nn!nn&nnB&1G&n 4 14 34 <4 =4 A4 B4 24 >4 54 144 44&14&34&<4&=4&A4&B4&24&>4&51 nn!n:;99:94 4&4A 4&1 4&1A 4&3 4&3A 4&< nn%n #: n "H334 "H
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n 1A< n ''n!nnn&n! nnnn"n%n!n n%nnn !n!n nn.nn&n 3 = B > 14 13 1= 1B 1A43343544>A4534554 !n9:! 99:9 +,)+,)( +,)n( +,)( ).nHn ).nHn=&3A714K=).nHn1&5<714K=).nHn1&3A714K=n nB&=n('nn%n'n !n" n%nnn ).n%nnnn.n !n nn!n nn: H4&An %IH4&AnIH4&BB2?&nn nr!n%!'nn!n'nnn! nnnn!n'n n%n nn).H1&3A714=n!nnnnnnn=3An"#&nn n%nnn!n!n'nn% nnnnn!n!nn!n "n%nnn!n'n nnn!!n"n %&nr!nnn!nn nnn,nnn nn!!n"n%&nn!n nnn n%'n!n!n !nnnn%nn !n"0).`n4&13=nnn%n.n n !n"0).Pn4&453&nn% n!nn%!nn!n nnn nnnn!n'nn' nn%&nr!nnn

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n 1A= n %!'nnn !n!n7n nnCnn&nF<>Gn !n!n nn,nnn"n%n n nn!$n!n n&n 4 14 34 <4 =4 A4 B4 24 44&14&34&<4&=4&A4&B4&24&>4&51 nn!n:; 99:9 4&44 4&4= 4&42 4&11 4&1A 4&15 4&33 4&3B 4&<4 4&<< 4&<2 nn%n #: n "H334 "H714KArn).nHn rn).nHn3&1<714K=rn).nHn1&4B714K=rn).nHn=&3A714K=rn).nHn1&=3714K=rn).nHn2&4>714KAnB&Annn%nnn nn%n nnn.n !n nn!nn1n nn).n %n:"HA=4n H4&3An%IH4&AnnIH4&BB2?&n nr!nnnn!nnn%nnn nnnnnnB&A nnn"n%nnA=4nn n$$nn: ?nnn4&3A&nnn%nn!nn nnnn%nn n nn'n!nn nn !n !nnn nn !n!n"n %n&nnnnB&An! n!n n!n).n%nnn n n2&4>714An!nnn%nn%nn'n n3=&43Onn!n nnnn%n n'nn>&<=O&nr!n!n nn%nnnnnn n%n!nnnn

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n 1AA n 'n,nn!nn.n&nr! nn'nnnn %n !n7nnn'nnn, nnn!nn n!n'n'nnn!nnn !n.&nn 4 A 14 1A 34 3A <4
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n 1AB n 'nn%&nnn nn n!nnnnn %n'n!!nnn nnn! n7n&nr!nnn 7n%nn!n'nn%nn !n&nr!n!n!n%n n%n!.nn&nFA=G&n 4 3 = B > 14 11 1< 1A 12 15 44&14&34&<4&=4&A4&B4&24&>4&51 nn!n:; 99:94 4&1 4&3 4&< 4&= 4&A 4&B 4&2 4&> 4&5 1 nn%n #: n ]nHn4&3A ]nHn4&2A ]nHn1&4 rn]nHn4&3A rn]nHn4&2A rn]nHn1&4n n nB&2nnn%nnn nn%n nnn.n !n nn!nnn n!nn$$nn nnn:"H2A4n).H=&3A714=n%IH4&AnIH4&BB2?&n n r!nn$$nnnnn: ?nn4&3Ann1n nn n!nnn! nnnB&2&nnn%n n!n!nn!!n nnn!nn%n %&n(n!!nnn%n n%n !n!n$$nn%!nnn! n!n.n: H4&3A?&nr!nnn % n!n$$nn!nn.n'nn nnn!n,n'n!!n !nnnnnnnnn n'nn!nnnn n''n!n&n(n!n$$nn' n nn!n.n!nnn

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n 1A2 n %n&nr!n%'nnn !n !n'nn%nnnn F2=Gnnnn,nnnn n.&nn 4 A 14 1A 34 3A <4
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n 12< n 4 3A A4 2A 144 13A 1A4 12A 344 33A 3A4 32A 44&14&34&<4&=4&A4&B4&24&>4&51 nn!n:;99:94 4&4A 4&1 4&1A 4&3 4&3A 4&< 4&
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n 12B n 4 > 1B 3= <3 =4 => AB 44&14&34&<4&=4&A4&B4&24&>4&51 nn!n:;99:94 4&4= 4&4> 4&13 4&1B 4&3 4&3= 4&3> 4&<3 4&3 n202 nn "n4&2An ).1 n4&4=BAn).3 n4&4=2nnnn4&B5nn :nIn?nn4&4Annnnnnnnnnnn:B&3?n n'n!nnn'n n%nnnn !n'nnnn n&n9 nnnnn n n!nn nn%n!n%nn' n!nnnn!nn

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TJ145 (Online)
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Lallave-Cortes, Jorge C.
0 245
Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical mechanical planarization process modeling
h [electronic resource] /
by Jorge C. Lallave-Cortes.
[Tampa, Fla] :
b University of South Florida,
Title from PDF of title page.
Document formatted into pages; contains 295 pages.
Includes vita.
Dissertation (Ph.D.)--University of South Florida, 2009.
Includes bibliographical references.
Text (Electronic dissertation) in PDF format.
Mode of access: World Wide Web.
System requirements: World Wide Web browser and PDF reader.
Co-advisor: Muhammad M. Rahman, Ph.D.
Co-advisor: Ashok Kumar, Ph.D.
Steady state
Transient analysis
Conjugate heat transfer with spinning boundaries
Slurry abrasive particles
CMP temperature distributions
Dissertations, Academic
x Mechanical Engineering
t USF Electronic Theses and Dissertations.
4 856