Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical mechanical planarization process modeling

Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical mechanical planarization process modeling

Material Information

Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical mechanical planarization process modeling
Lallave-Cortes, Jorge C
Place of Publication:
[Tampa, Fla]
University of South Florida
Publication Date:


Subjects / Keywords:
Steady state
Transient analysis
Conjugate heat transfer with spinning boundaries
Slurry abrasive particles
CMP temperature distributions
Dissertations, Academic -- Mechanical Engineering -- Doctoral -- USF ( lcsh )
non-fiction ( marcgt )


Dissertation (Ph.D.)--University of South Florida, 2009.
Includes bibliographical references.
System Details:
Mode of access: World Wide Web.
System Details:
System requirements: World Wide Web browser and PDF reader.
General Note:
Title from PDF of title page.
General Note:
Document formatted into pages; contains 295 pages.
General Note:
Includes vita.
Statement of Responsibility:
by Jorge C. Lallave-Cortes.

Record Information

Source Institution:
University of South Florida Library
Holding Location:
University of South Florida
Rights Management:
All applicable rights reserved by the source institution and holding location.
Resource Identifier:
002029667 ( ALEPH )
437033959 ( OCLC )
E14-SFE0002968 ( USFLDC DOI )
e14.2968 ( USFLDC Handle )

Postcard Information



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Lallave-Cortes, Jorge C.
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Numerical heat transfer during partially-confined, confined, and free liquid jet impingement with rotation and chemical mechanical planarization process modeling
h [electronic resource] /
by Jorge C. Lallave-Cortes.
[Tampa, Fla] :
b University of South Florida,
Title from PDF of title page.
Document formatted into pages; contains 295 pages.
Includes vita.
Dissertation (Ph.D.)--University of South Florida, 2009.
Includes bibliographical references.
Text (Electronic dissertation) in PDF format.
Mode of access: World Wide Web.
System requirements: World Wide Web browser and PDF reader.
Co-advisor: Muhammad M. Rahman, Ph.D.
Co-advisor: Ashok Kumar, Ph.D.
Steady state
Transient analysis
Conjugate heat transfer with spinning boundaries
Slurry abrasive particles
CMP temperature distributions
Dissertations, Academic
x Mechanical Engineering
t USF Electronic Theses and Dissertations.
4 856


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n A= n nn!nnnnn n! n%nD!nF1<2G&nr!n!n nnn!n%nnn n7nn%n%&n +n!n!nnn!nnn n!n%nnnnnn%n %&n"'nn!nnnn 'n!nnnn nn'nn%nnn nnn:<&3&1A<&3&1>?nn n!n!n&n ((&6nn+5nn nnn7 n !nnnn8 (n7nn,nn!n!!n n$$nnnn!n nnnnn!nn.n! nnnnn'n %n!n$7nn! nnn<&A&nr!n nnnnnnn n n!nn n!n7nn! nnnnnn%n &nn n n<&Anr!nn!nn7 n nn ,nnnnn!n.n !n nn%&n n n


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n AB n (nn!nn n!n%n%! nn!n.nnH4n!n n nnnnn'nnn!n7n n!n%nnn!n.n !n !nnnn.n&nnn nn!n%n%n!n7nn nn I nnn%nn&nr!nnn!n 'nnn n: nn$nn'?nnnn %n nnn nn !nnn nn%n nnF1?n # # #$ % E $ E $ E E E E Q3 R # #$ % n n # #$ % # #$ % n E 3 $ $ E E V < 3 $ E $ E V $ $ $ E E E 3 V < 3 1nnn:<&<&15?n # #$ % # #$ % # #$ % $ R E V $ R E V 1 R E E $ R E $ E R E E R E Q3 3nnnnnnnn:<&<&34?n # #$ % # #$ % $ E $ E V 1 $ Q $ $ E $ E $ E E $ E Q # #$ % E E $ $ E 3 V < 3 $nnn:<&<&31?n ( ( # #$ % # #$ % # #$ % $ r $ r 1 $ r $ E r E r Q # #$ % # #$ % # #$ % # #$ % n3 3 3 3 R E R E 3 1 $ $ E E E V 3 # #$ % # #$ % # #$ % 3 3 3$ $ E E E < 1 $ E $ E 3 1 $ R E 3 1nnn:<&<&33?n r!n'nnnn!nnn%n n-n # #$ % 3 3 3 3$ r r 1 r W rnnnnnnnnnnnnnnnnnnnnnnnnnn:<&<&3<&<&3

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n B< n nnn: nn$nn'?nnnn n nnn%nnnF1?n


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n 2> n <371A3n&nr!n'nn n4&B5O&nr! n!nn n nnnn3B7>An&nn +%n!n0n!n nnnn! nnn!n!n !&nr!n08n'n!nnnnr!H4nnIH4&2Ann! nnr%n<&3&n r!n!n%'nnnn:<&B&1nn<&B&=?n n'nnn!nn nn'nn08n'nn!n n!n&nr!nnn nr%n<&3n! n!nnnn3B7>Ann!n nn !nnnnn <&A4B5n<<5&=5Bn4&<55n 3n3B7>An03
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n >A n (4(&!nnnn8n!nnnnn n' nnn%nn %nnn nnnn!n nn!nnnn nnn<&12&nr!nnn% nnn !n!n %nn'nn nnn<=7B 4&13 4&1B 4&3 44&14&34&<4&=4&A4&B4&24&>4&51nn!n:;nn%n#: n $n7nnHn33n7nA5 $n7nnHn3>n7nB< $n7nnHn<3n7n23 $n7nnHn<=n7nA5 $n7nnHn<=n7nB< $n7nnHn
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n >B n &nr!nnn!n0n!nnn nnnn%nn! nn!n nnn!nnnnnn n'&n r%n<&Bn0n'nnnn<&12&n "n;n#+n0nn :O?n rnnIHn4&=n :/?n r!H4nnnnIHn4&=n:/?n )&<&B&An :O?n 1n<=(A5013nHn>&>(14&>(14=n<<<&43=13An nA&2(14&n r!nnn%nn nn!n%nnnnn1< ==&nnnn1<==n n'nnnnnn !nn2>4nn1B44n&n r!n'nnnn n4&43==O&n(nnn n%nn!n nn,n% n!n nnn! nn!.n nnn !$n!nnn!n!n&nr! nn!nn n nnnnnn1<==n&n nnnn

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n >2 n 35B 35B&A 352 352&A 35> 35>&A 355 355&A <44 <44&A <41 K1K4&2AK4&AK4&3A44&3A4&A4&2A1nn nnI n nDnr/ <34n 2>4n 1<==n 1B44n 3<4=nn) rn) n n<&1>nrn%nn!n nn%!n!n%n nn'n%nnn:JHBAnIn H1An"#n H1A4n"#n9H4&=n HA4n nH3=&
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n 54 n %nn$&nnn%nn!nn!n %nn!.nn !n n!nnnn!n nn 'nnn!nnn !.&nr!nnnn'n$&nr!n !nnn%'nn!n n'nnnn !n!n7 nnnn&nF12G&n 4&4B 4&45 4&13 4&1A 4&1> 4&31 4&3= 4&32 4&< 4&<< 4&44n n=&3nnn!!n%nn n"n%n !n n n!nn1n:).H3&BA714=n H3&B2n%IH4&A?&n n n=&3nn!nnn!!n% nnn"n %n !n!n,n.n!nnn!n. n !nnnnnnnn13An "#&nnn%nn!n!nnnn nnn 'n!n&n(n!n "n%nn!nn!nn! .nn!nnn nnnnnnn'n !nnnn!!nn 'nn!n&nn!nn nn!nn'n!n n nnnn!n,nnn n !n!nn&n r!n%'nnnn !n!n7 n .nn#$nn&nF<2G&n

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n 5< n nn!nnnn!n'n n%nn'n!nn &n 4 =4 >4 134 1B4 344 3=4 3>4 <34 rnn).H3&BA714K= rnn).H2&25714KA rnn).H=&A2714KA rnn).H<&3<714KA rnn).H3&31714KA ).nHn3&BA714K=).nHn=&B714KA).nHn3&3714KArn).nHn3&BA714K=rn).nHn=&B714KArn).nHn3&3714KA).nHn ).nHn2&>714KA).nHn<&3714KArn).nHn rn).nHn2&>714KArn).nHn<&3714KAn n=&Annnnn nn%n%n nnn n !n nn!nn nnn).n %n:"H1A44n H3&B2n%IH4&A?&n nr!nnnnn!nn nn !nnn nnnn%nn nnn=&A&nnn%nn!n n%n%nnn!n n !n!n'nnn nn).n%nnn=&A&nn nnnnnnnn !n.n !n!nnn!nn nn%n!nnnn !!&nr!nnn!nn"H1A44n! n nnnn%n!n nn!nn,&n 'n!n nnn !nn!nn.nn !n!n' nn).n%&nnn%nn

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n 5= n !nnnnn !n!nnn!nn nnn!n!nnnn' n,nn!n &n r!n'nn%nn!nn n'nnnn n).n%nn!!nnn n" n%nn! nnn =&B&n(n!n).n%nnn3&BA714=nn3&31714An!n'nn %nn!nnnn%n n'n32&1AOnn!!n "n%n:"H1A44?nn1<&15Onn n" n%n:"H2A4?n !nn 'nnn34&12Onn&n 4 = > 13 1B 34 3= 3> 4&)U44A&)K4A1&)K4=3&)K4=3&)K4=<&)K4=<&)K4= +n9:+ 99:94 <444 B444 5444 13444 1A444 >nn:" <8;&?= nn"H1A44 nn"H2A4 nn"H1444 !nn"H1A44 !nn"H2A4 !nn"H1444n n=&Bn('nn%nn!n nn'n !n ).n%nnnn n !n nn!n nn: H3&B2n %IH4&A?&n n r!nnn.n!.n'nn!n nnn nnnn%nn! nn n=&2&nn

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n 1AB n 'nn%&nnn nn n!nnnnn %n'n!!nnn nnn! n7n&nr!nnn 7n%nn!n'nn%nn !n&nr!n!n!n%n n%n!.nn&nFA=G&n 4 3 = B > 14 11 1< 1A 12 15 44&14&34&<4&=4&A4&B4&24&>4&51 nn!n:; 99:94 4&1 4&3 4&< 4&= 4&A 4&B 4&2 4&> 4&5 1 nn%n #: n ]nHn4&3A ]nHn4&2A ]nHn1&4 rn]nHn4&3A rn]nHn4&2A rn]nHn1&4n n nB&2nnn%nnn nn%n nnn.n !n nn!nnn n!nn$$nn nnn:"H2A4n).H=&3A714=n%IH4&AnIH4&BB2?&n n r!nn$$nnnnn: ?nn4&3Ann1n nn n!nnn! nnnB&2&nnn%n n!n!nn!!n nnn!nn%n %&n(n!!nnn%n n%n !n!n$$nn%!nnn! n!n.n: H4&3A?&nr!nnn % n!n$$nn!nn.n'nn nnn!n,n'n!!n !nnnnnnnnn n'nn!nnnn n''n!n&n(n!n$$nn' n nn!n.n!nnn

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n 1A2 n %n&nr!n%'nnn !n !n'nn%nnnn F2=Gnnnn,nnnn n.&nn 4 A 14 1A 34 3A <4
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n 1A> n !n!n'n!n nn%&n! nn%nnnnn !n!n%nnn!nn 'n!n'nnn!n &nn .nnnnn n !nnn&nF>4Gnn !n nnn%nnnn!!n 'n&n 4 > 1B 3= <3 =4 => AB B= 44&14&34&<4&=4&A4&B4&24&>4&51nn!n:;99:94 4&4< 4&4B 4&45 4&13 4&1A 4&1> 4&31 nn%n #3 33 3 n ( +' + rn( r rn rn+' rn+n nB&5nnn%nnn nn%n nnnn !n nn!n nn:"H>2An ).H=&3A714=n H4&An%IH4&AnIH4&BB2?&n nnB&5n! n!nnn nnnn %n%nnnnnn nnn:I?nn n!n7nn7nn nnn !n nn!n .n&nr!nnn %nn'n! n!n!n 'nn!n!n7n%&n n! n!n nn n!nn$nnnnn! n!!nnnn !nnnn !n!nn &nnn'n! nnn

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n 1B1 n %nnnnn!nn! nnnnn ,nnn&nr!nn! n%nn!nnnn %nnn!n n-n'H1&5=3>3 nn4&1nn "n4&2An ).n4&1nnn4&2nn :nIn?nn4&4Annnnnnnnnnnnn:B&1?n n'n!nnn'n n%nnnn !n'nnnn n&n9 nnnnn n n!nn nn%n!n%nn' n!nnnn!nn n&nr!nnn'n! n nnn'n!n &nr!nnn!n7n nn n!nnn'nn 'nn%n !n!n&nn n!nnnn!n n'nn%n nn-nOnnHn::'nn'?I'?n. 144&nr!n'nn%n'nnn nn1A&1
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n 1BB n n$$nn: ?nnn4&A&nnn%nn!n!nn n%nn!nn'n!nn4 nPIPn4&Onn nB&1=Lnn!n).n%nnnn .nnn nn2&4>714An n!nnnnnnnn 13An"#n:).3H=&3A714=?nn!nn n.&nr!nnn nn%nn'nn 14&>AOnnnB&1=nnn"n%nnA= 4&nr!n!nnn %nnnnnnn%n! nnnn'n ,nn!nn.n&nr!n n'nnnn%n !n7nnn'nnn,n nn!nnn!n 'n'&n nB&1An! n!nnnnn! nnn.nn ,n !nnnnnn!n nn.nnnn %nnnnn %nnn"n%nn A=4nnn$$nn: ?nnn4&A&nnn%nn!n nnnnnnnn<2An"#n n:).3H1&=3714=?nn!nn

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n 1B2 n n%nnn nn' n!nnnn !n nnnn !n!n"n% nn! nnnB&13nn !nn.nnnnnn nnn!nnn nnnB&1=&nn 4 14 34 <4 =4 A4 B4 24 >4 44&14&34&<4&=4&A4&B4&24&>4&51 nn!n:;99:94 4&4= 4&4> 4&13 4&1B 4&3 4&3= 4&3> 4&<3 4& nn%n #: n +1 +3 +< += +A +11 rn"H334 rn"H714KArn).3nHn=&3A714K=rn).3nHn1&=3714K=rn).3nHn2&4>714KAn nB&1An)nn).3n'nnnn%nn n nn%nnnn .n !n nn!n n1n:"HA=4n H4&An%IH4&AnIH4&BB2n).1H=&3A714=?&nnnB&1An! n!nnn nn !n!n nn!nnnnnnn nn<2An"#n:).3H1&=3714=?nn n !n!nnnnn!n! nnnn'n ,nn!n.&nr!nnn%n n%nn'nnA&53Onn!n nnnn%n n'nn4&=4OnnnB&1ALnn !n).n%nn!nnnn nn nn1&=3714=nn!n nnnnnnn13An"#n:) .1H=&3A714=?nn!nn

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n 1B> n n.&n 'n7nnn nnnA44nn2A4n"#n :).3H1&4B714=nn2&4>714A?n !n!!n'nnnn nn n'nnn%n nnn!nnnn!n n&nn!nnn!n nnn'nn !n!n n&n(n!n!!nnnn !nn.n:=nnBnnnn !n%n.?n!n!n%nn nn!n!n%n.nnn n n n%n!nnnnn !nn.&nr!nn nn %nn!'nnn!nnn!n n&n 'n !n!n nnnn!nnn:IH4&BB2?n!nnn7n%n!nn .nnnnn!nnn n!nnn!n nn!nnn!n .&nr!n!nnnn n nnnnnnn&n r!nnn%!'nnn !n!n%' nnnnC .nF
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n 1B5 n 4 2 1= 31 3>
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n 121 n 4 5 1> 32 1 54 44&14&34&<4&=4&A4&B4&24&>4&51 nn!n:;99:94 4&4= 4&4> 4&13 4&1B 4&3 nn%n #: n ]nHn4&3A ]nHn4&A ]nHn4&2A ]nHn1&4 rn]nHn4&3A rn]nHn4&A4 rn]nHn4&2A rn]nHn1&4n nB&12n)nn$$nnnnnnnn%nn nnn%n nnn.n !n nn!nnn:"H544n%IH4&An).13H=&3A714=nIH4&BB2?&nn(n nn% n$$nnn n'n nnn nn!n,n'nnn!nn !!n!nnn &nnnnnn'n. nnnnn n!nn.nn!nnn n!nnn&nnn%n nn!nnnB&12n'nn H4&3A4&2Annn!n !nn H1nn!!nnn%nnn!n .&nnnB%nnn%nn !nnnn%n'n n !nnnnnn nn%'nn H1&nr!nnnnn n !n !nn% nnnnn n&nr!nn7nn n !n!nnn nn n'nn nn!$n

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n 12< n 4 3A A4 2A 144 13A 1A4 12A 344 33A 3A4 32A 44&14&34&<4&=4&A4&B4&24&>4&51 nn!n:;99:94 4&4A 4&1 4&1A 4&3 4&3A 4&< 4&
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n 12= n 4 1A <4 =A B4 2A 54 14A 134 44&14&34&<4&=4&A4&B4&24&>4&51 nn!n:;99:94 4&4A 4&1 4&1A 4&3 4&3A 4&< 4&
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n 12B n 4 > 1B 3= <3 =4 => AB 44&14&34&<4&=4&A4&B4&24&>4&51 nn!n:;99:94 4&4= 4&4> 4&13 4&1B 4&3 4&3= 4&3> 4&<3 4&3 n202 nn "n4&2An ).1 n4&4=BAn).3 n4&4=2nnnn4&B5nn :nIn?nn4&4Annnnnnnnnnnn:B&3?n n'n!nnn'n n%nnnn !n'nnnn n&n9 nnnnn n n!nn nn%n!n%nn' n!nnnn!nn

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n 31= n 352 355 <44 <43 <4< <4A <4B 4A141A34 rn:?Dnrrn:/n?4 4&= 4&> 1&3 1&B 3 3&= 3&> <&3 <&B = =&= =&> A&3 A&B B B&= B&>DKnrn9 rn:/? 144 3A4 144 3A4 U (0r) )rnJnHn<4nIrnJnHn2AnI9 rnJnHn<4nI9 rnJnHn2AnIn :?nn 35A 35B 352 35> 355 <44 <41 <43 <4< 4A141A34 rn:?Dnrrn:/n?4 4&< 4&B 4&5 1&3 1&A 1&> 3&1 3&= 3&2 < <&< <&B <&5 =&3 =&A =&> A&1 A&= A&2 BDKnrn9 rn:/? 144 3A4 144 3A4 rnJnHn<4nIrnJnHn2AnI9 rnJnHn<4nI9 rnJnHn2AnI r) ) U 10 n :%?nn n2&13nrn nn% nn nnn nn nn nnnn nnnI H2I>nn !-n:?n
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n 31A n 4 34 =4 B4 >4 144 134 1=4 1B4 1>4 344 4A141A34 rn:?Dn!nn&n!:DI3/?4 14 34 <4 =4 A4 B4 24 n!nn&n!:DI3/? 144 3A4 n 144 n 3A4 U 4DJnH<4nI DJnH2AnI JnH<4nI JnH2AnI(0r) )n :?nn 4 1= 3> =3 AB 24 >= 5> 113 4A141A34 rn:?Dn!nn&n!:DI3/?4 2 1= 31 3>
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n 332 n 4 34 =4 B4 >4 144 134 1=4 1B4 1>4 344 334 3=4 4A141A34 rn:? Dn!nn&n!:DI3/?4 1A <4 =A B4n!nn&n!:DI3/? 144 3A4 n 144 n 3A4 D H1An D H2An H1An 41 U $&0) r) n :?nn 4 3A A4 2A 144 13A 1A4 12A 344 33A 3A4 32A <44 <3A 4 144n!nn&n!:DI3/? 144 3A4 n 144 n 3A4 D H1An D H2An H1An 41 U( 0 ) r)n :%?nn n2&15nDnnnn!nn 'nnn n nnnnn-n:?n"n nnI H1nn!n 13n8.nnn:%?n"nnnI H2I>nn!n
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n 353 n ##n,+7n* )(nH@n I#(r(Cn2&=&4n:"3442?nnI9E)"+9n9n)*r"(n)nr9n#(r(Cn(r(C(+)n(+n( n*rn)n n760.3,/042;,;2?n/-63,/0#E-/82-I.//5;,0234E-/82-I.//5;,0234E-/82-=I=.//5;,0234E-/82-I49?45236547/-;45C0294JrKD/.69403+20;n433,0E+DG/94D4+H3/?D7,;2?D54++D"&?+,DJL7,-4C0294J&nJL76--C?23G+35.237/-;45C0294JDJ7,-4C0294LM0294=N!#76--C?23GLO7,-4C0294L0294LP760.3,/0M0294=N!#7?0463C0294M0294N34:3542;7?0463C0294JI!.I;JLF45/+"L7,;7/?407?0463C0294L7E43+7,;L7+.2077,;JIQ;I7I7I7I7JM"NL7.-/+47,;LKL!KL#KL="KLnIn(r(n")("(r9n(n")(""(0)nn(n#(r"Xn9"#nn760.3,/0C-/3#C54?I54?254;2327/5#?-/3+E-/82-E-/82-E-/82-=E-/82-E-/82-E-/82-E-/82-=E-/82-

PAGE 319

n 35< n ##n,+
PAGE 320

n 35= n ##n,76nn%n,n#n nn r%n&1nnnnrnnnn<&1&n#)+n +@)n *#C)"n9n ))#)r+n #)+n r)#n +()rMn (r9"n n<3<&1B<2An B=72Bn=>B=n<3<&15ABBn 1&3An n0nnnnn 1&A513&2551&2A5% # # # $ !1!3 !&nn1 r
PAGE 321

n 35A n ##n,214< >&4BA14< 4&411% # # # $ !n n(nnn'nn'nn nnn<&1
PAGE 322

"" n&n'nn n%nn#$n n"nn'&n


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